Atomic Layer Deposition for Semiconductors
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This edited volume discusses atomic layer deposition (ALD) for all modern semiconductor devices, moving from the basic chemistry of ALD and modeling of ALD processes to sections on ALD for memories, logic devices, and machines.
| Nakladatel: | Springer-Verlag New York Inc. |
| ISBN: | 9781489979438 |
| Rok vydání: | 2016 |
| Jazyk : | Angličtina |
| Vazba: | Paperback / softback |
| Počet stran: | 263 |
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